jvk Services LLC

Services for Semiconductor Process Tools

Troubleshooting
Frequently Asked Questions

Always follow your fab/lab safety procedures before initiating any actions.


Sometimes a problem can be solved with just a phone call. Others require an inspection to determine the fault and devise a solution. On this page we'll be listing frequent problems and solutions and adding to it as time goes by. If you don't see your problem here, e-mail your questions or call us and we'll do our best to get you up and running ASAP.
Q: We're getting RF errors and we're on a deadline. Do you have any recommendations for a fix?

A: Here are some things you can try:
  • Check the electrode resistance to ground: it should be greater than 600k ohms.
  • Check your water source and cooling loops. The error message could be caused by dirty water and a dirty chamber. To decontaminate the water system:
  1. Mix up a solution of 5% -10% hydrogen peroxide, balance RO or distilled water.
  2. Flush solution through the system.
  3. Next, flush four or five times with RO or distilled water.
  4. Last, using a solution of 5% ethylene glycol, balance distilled water, charge up your heat exchanger.
If you still get error messages, e-mail or call us for help specific to your system.

Q: Our computer operating system locks up during boot up. How can we fix this?

A: This is a common problem. It could be that the software isn't loading properly or the RAM, hardware or computer itself may have gone bad. We can't get older hard drives as replacements any more and the new ones won't work with older systems. We can do an inspection but your best bet may be an upgrade, which we have available. E-mail for details.






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