jvk Services LLC

Services for Semiconductor Process Tools

Welcome to our Home Page!

We've been providing consultation and repair services to the semiconductor industry since 1984. We specialize in vacuum and plasma process systems and tools including PECVD, RIE and Plasma Etchers.


Our services include:
  • Repair service
  • Automation upgrades and design modifications
  • Consultation/evaluation of used semiconductor and vacuum process equipment
  • Design and build systems to customer specifications: Plasma Enhanced Chemical Vapor Deposition tools, Reactive Ion Etchers and Plasma Etchers
  • Training
For repair services, we travel to your site for evaluation, troubleshooting and repairs. Contact us for rates. We offer special discounts to educational institutions.

Plasma in RIE Chamber

Some of the more popular brands we've serviced:

  • Plasma Therm
  • Drytek
  • Oxford Instruments
  • MicroScience
  • Technics
  • Plasma Systems

New product available now: jvk PC5KR 

Drop-in replacement for AE PC5000 system controller. This upgrade features GUI operator interface and stores recipes on a hard disk. This new vacuum system controller can be used on the Plasma Therm 70 Series and other brands. Unit ships with monitor and keyboard with trackball.  Contact us for specifications.

jvk PC5KR front view
jvk PC5KR front view
jvk PC5KR back view
jvk PC5KR back view



We occasionally offer used equipment for sale. Check out our Equipment for Sale page or contact us for tools and systems currently available.




Copyright 2009 jvk Services LLC. All rights reserved.

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